@article{49801,
  author = {Chih-Kuan Tung and Robert Riehn and Robert Austin},
  title = {Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes},
  abstract = { <p><a href="http://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3212074" data-url="http://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3212074">http://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3212074</a></p> },
  year = {2009},
  journal = {BIOMICROFLUIDICS},
  volume = {3},
  url = {http://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3212074},
  language = {eng},
}