@article{50606,
  author = {Cao and Yu and Wang and Tegenfeldt and Austin and Chen and Wu and Chou},
  title = {Fabrication of 10 nm enclosed nanofluidic channels},
  abstract = { <p><a href="http://scitation.aip.org/content/aip/journal/apl/81/1/10.1063/1.1489102" data-url="http://scitation.aip.org/content/aip/journal/apl/81/1/10.1063/1.1489102">http://scitation.aip.org/content/aip/journal/apl/81/1/10.1063/1.1489102</a></p> },
  year = {2002},
  journal = {Applied Physics Letters},
  volume = {81},
  pages = {174-176},
  language = {eng},
}