Tung, Chih-Kuan, Robert Riehn, and Robert Austin. 2009. “Complementary Metal Oxide Semiconductor Compatible Fabrication and Characterization of Parylene-C Covered Nanofluidic Channels With Integrated Nanoelectrodes”. BIOMICROFLUIDICS 3. Referenced from scitation.aip.org: Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes.
Robert Riehn
First name
Robert
Last name
Riehn