Fabrication of 10 nm enclosed nanofluidic channels

Author

Cao, Yu, Wang, Tegenfeldt, Austin, Chen, Wu, Chou

Publication Year

2002

Type

Journal Article

Abstract

http://scitation.aip.org/content/aip/journal/apl/81/1/10.1063/1.1489102

Journal

Applied Physics Letters

Volume

81

Issue

1

Pages

174-176